untethered atom · TEM

Beam damage in the TEM: is that the beam, or the sample?

Below the critical voltage, knock-on stops. Radiolysis does not care about the voltage.

The beam can move atoms (knock-on), break bonds (radiolysis) and heat the specimen. Before you call a change real, check each one. This lab gives you the numbers: the voltage below which knock-on stops, the test that tells radiolysis from knock-on, how many electrons per Å2 your settings deliver, and how hot a probe can make the spot under it.

Try a lesson:
Emax ÷ Ed against voltage. Above 1, a beam electron can knock an atom out of its site. Bold: your material. Dashed: your voltage.

Ed: one representative value per element. Real values depend on direction and on whether the atom sits at a surface or edge, where it is easier to remove.

Same total dose, two rates. x: how far through the exposure. The fast exposure is shorter, so there is less time to heal.
The dose-rate test. Final damage against dose rate, same total dose. Flat line: knock-on-like. Rising: something heals between hits.
Dose against time. Red line: your material's critical dose. Where they cross is your time budget. Axes fixed.
Temperature rise against probe diameter (log-log, fixed axes). Bold: your settings. Thin: a polymer, a carbon film and a metal at the same current. A thin foil: electrons pass through and leave only a little energy (Egerton, Li and Malac 2004).

Specimen and voltage

Moving A or Ed switches the material to "your own". Knock-on happens only above the critical voltage. Below it, damage you see is something else.

Is it the beam? Six checks

CheckWhat you doTabWhat it tells you
1 Knock-onCompare your voltage with the critical voltage for the lightest atom that matters.Knock-onBelow it, knock-on is impossible. Above it, lowering the voltage is the fix.
2 Dose rateGive the same total dose at two very different dose rates, on fresh areas.RadiolysisA different outcome means something heals or diffuses between hits: not knock-on alone.
3 Dose seriesImage one area again and again and track a feature (diffraction spots, a spectrum edge) against accumulated dose.Dose budgetThe dose at which it fades is your critical dose. Stay well below it.
4 Your doseWork out e/Å2 per second (TEM) or per frame (STEM) from current, beam size, pixel size and dwell.Dose budgetHow long, or how many frames, you have before the feature is gone.
5 HeatingEstimate the temperature rise for your current and material.Beam heatingUsually a few K or less in a thin foil. Large only for poor conductors, large currents or foils with poor contact.
6 ControlWatch a region the beam has not seen. For in-situ tests, repeat with the beam blanked except for short snapshots.If the change happens only where the beam was, the beam is part of it.

Do it on your own sample

  1. Measure the beam current (screen current, a Faraday cup, or a calibrated detector) and write it down with every image.
  2. Find the critical voltage for the lightest atom in your sample. Pick the voltage below it if you can.
  3. Measure your critical dose once: a dose series on a spare area, with the dose rate you will really use.
  4. Set the dose budget: current, beam size or pixel size, dwell and number of frames.
  5. Run the dose-rate test if radiolysis is possible: same total dose, 10 times faster and 10 times slower.
  6. Report the dose (e/Å2) and dose rate (e/Å2/s) in your methods section.

Scope and limits

The knock-on formula is exact for a free, resting nucleus. It leaves out atoms at surfaces and edges (easier to remove), thermal vibration (which lowers the threshold a little) and channelling. The displacement energies are single representative values. The radiolysis tab is a picture with arbitrary units, made to show the dose-rate test, not a rate model for any material; real radiolysis can also show a true dose-rate threshold. The dose tab assumes a uniform beam and, in STEM, a probe smaller than a pixel. The heating tab uses the thin-foil result of Egerton, Li and Malac with radiation neglected; it assumes a uniform foil connected to a heat sink at a fixed distance, and the value for energy left per nm is an estimate. Contamination and charging, two other common beam effects, are not covered.

On this site: Scattering in the TEM · FIB specimen prep: what the ion beam does · EELS thickness calculator · Quantitative HAADF · GPA strain mapping

Questions people ask

How do I tell radiolysis from knock-on in my own experiment?

Two tests. Lower the voltage below the critical voltage: knock-on stops, radiolysis often gets worse. Change the dose rate at the same total dose: radiolysis changes, knock-on does not.

Is a lower voltage always safer?

Only for knock-on. At lower voltage each electron loses more energy in the sample, so radiolysis per electron goes up. For beam-sensitive organics and many oxides, a higher voltage can be better.

Why does cooling help some samples?

Cooling slows the movement of broken bonds and radicals, so less damage becomes permanent. It does little for knock-on, which is a direct collision.

Can the beam really heat my sample by hundreds of degrees?

Rarely, in a thin foil. The electrons pass through and leave only tens of eV each. A few K is typical. Poor conductors, large currents and foils that are cut off from their support are the exceptions. Estimates that use the full beam power are far too high for thin foils.

References

Show the 6 references
  1. D. B. Williams and C. B. Carter, Transmission Electron Microscopy, 2nd ed., Springer (2009): chapter 4 (inelastic scattering and beam damage).
  2. R. F. Egerton, Control of radiation damage in the TEM, Ultramicroscopy 127, 100 (2013).
  3. R. F. Egerton, P. Li and M. Malac, Radiation damage in the TEM and SEM, Micron 35, 399 (2004). Equation 4 is the thin-foil heating formula used here.
  4. J. C. Meyer et al., Accurate measurement of electron beam induced displacement cross sections for single-layer graphene, Physical Review Letters 108, 196102 (2012).
  5. F. Banhart, Irradiation effects in carbon nanostructures, Reports on Progress in Physics 62, 1181 (1999).
  6. R. Sarkar, C. Rentenberger and J. Rajagopalan, Electron beam induced artifacts during in situ TEM deformation of nanostructured metals, Scientific Reports 5, 16345 (2015).
Cite this page: Tripathy, Manisha. “Beam Damage in the TEM.” untethered atom, 2026, https://untetheredatom.com/tem/beam-damage.
BibTeX
@misc{tripathy2026beamdamage,
  author = {Tripathy, Manisha},
  title  = {Beam Damage in the TEM},
  year   = {2026},
  howpublished = {\url{https://untetheredatom.com/tem/beam-damage}},
  note   = {Interactive web tool}
}
Last updated 23 September 2026.